A NOVEL OPTICAL ACCELEROMETER

被引：19

作者：

ABBASPOURSANI, E

HUANG, RS

KWOK, CY

机构：

[1] Department of Electronics. University of New South Wales

来源：

IEEE ELECTRON DEVICE LETTERS | 1995年 / 16卷 / 05期

关键词：

D O I：

10.1109/55.382228

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

A novel accelerometer based on a PIN photo-detector and a micro-machined cantilever-beam-supported optical shutter with seismic mass has been designed, fabricated, and tested. Anisotropic wet etching of [110] orientation silicon in KOH is used to fabricate an optical shutter consisting of evenly spaced vertically etched slots. The shutter, which also constitutes the seismic mass of the accelerometer, is suspended by two cantilever beams. The special structure of the device and the high aspect ratio of the cantilever beams (7.5) permit freedom of the movement for the proof mass (the shutter) on the +/-X axis only, The actual size of the device is 3x4 mm and its amplified output varies linearly from -3.6 V to +3.6 V for accelerations from -84 g to +84 g. The measured resonant frequency of the device is 3.2 KHz. A dual diode structure is chosen for the photo-detector to compensate for temperature drift and the amplified output voltage changes by less than 40 mV for a temperature variation from 25 degrees C to 50 degrees C.

引用

页码：166 / 168

页数：3

共 6 条

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[6]

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