PIT GROWTH IN NIFE THIN-FILMS

被引:36
作者
FRANKEL, GS
DUKOVIC, JO
BRUSIC, V
RUSH, BM
JAHNES, CV
机构
[1] IBM Research Division, T.J. Watson Research Center, Yorktown Heights
[2] Denartment of Chemical Engineering, University of California, Berkeley
关键词
D O I
10.1149/1.2221202
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Pit growth was studied in 80Ni-20Fe sputtered thin films by analysis of images of the growing pits. The pit current density was found to increase with pit growth potential until reaching a limiting value. The limiting current density increased with decreasing film thickness. The mass-transfer resistance to the active pit wall exceeds by an order of magnitude that predicted from a simple radial-diffusion model. It is suggested that the undercut, remnant passive film collapses over the pit wall causing a constriction. A voltage component calculation matches the data rather well and indicates that pit growth below the limiting current density is limited by a combination of ohmic, concentration, and surface activation considerations.
引用
收藏
页码:2196 / 2201
页数:6
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