SIC THIN-FILM THERMISTORS

被引：38

作者：

NAGAI, T

ITOH, M

机构：

[1] Housing Products Research Laboratory, Matsushita Housing Products Company, Ltd., Tsutsui, Yamato Koriyama, Nara

来源：

IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS | 1990年 / 26卷 / 06期

关键词：

D O I：

10.1109/28.62400

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A thermistor using an RF-sputtered SiC film has been developed as a temperature sensor for cooking products. Since the SiC film has the advantage of being able to detect temperatures over the wide range of 0-500°C and a good thermal stability, the thermistor can be applied not only to a conventional oven but also to a pyrolytic self-cleaning oven. Moreover, since the thermistor can detect surface temperatures with a rapid thermal response by contacting physically with an outer surface of an object, it can also be applied to a surface cooking top. The construction and electrical properties of the SiC thermistor and its applications to cooking products are described. © 1990 IEEE

引用

页码：1139 / 1143

页数：5