DIGITAL COMPENSATION OF HIGH-PERFORMANCE SILICON PRESSURE TRANSDUCERS

被引：22

作者：

CRARY, SB

BAER, WG

COWLES, JC

WISE, KD

机构：

[1] Center for Integrated Sensors and Circuits, Solid-State Electronics Laboratory, University of Michigan, Ann Arbor

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 21卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(90)85014-U

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Calibration and compensation have been performed on two silicon piezoresistive pressure transducers and a silicon capacitive pressure sensor, using a semi-automated, computer-based system. Stepwise regression using polynomial functions is shown to be a useful technique for the calibration and compensation of these devices. © 1990.

引用

页码：70 / 72

页数：3