Propagation length of guided waves in lossy Si film sandwiched by identical dielectrics

被引：12

作者：

Takabayashi, M

Haraguchi, M

Fukui, M

机构：

[1] Department of Optical Science and Technology, The University of Tokushima, Tokushima

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS | 1995年 / 12卷 / 12期

关键词：

D O I：

10.1364/JOSAB.12.002406

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have measured a propagation length L of TM(0) and TE(0) guided waves in a lossy Si film surrounded by identical dielectrics 632.8 nm in wavelength. The propagation length L(ATR)((E)) estimated from experimental attenuated total reflection (ATR) spectra deviated largely from the propagation length L(ATR)((T)) estimated from calculated ATR spectra in the range of small optical thickness of Si film h(opt). This discrepancy may arise from an angular beam spread of incident light. We have proposed a method to measure L directly. This method gave us an L for TM(0) guided waves of 1.6 mm at h(opt) = 6.1 nm. This value is in good agreement with L(ATR)((T)) when L(ATR)((E)) = 0.2 mm, under certain conditions.

引用

页码：2406 / 2411

页数：6

共 12 条

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