EFFECT OF ION-IMPLANTATION ON THIN HARD COATINGS

被引：20

作者：

AUNER, G ^{[1
]}

HSIEH, YF ^{[1
]}

PADMANABHAN, KR ^{[1
]}

CHEVALLIER, J ^{[1
]}

SORENSEN, G ^{[1
]}

机构：

[1] AARHUS UNIV,INST PHYS,DK-8000 AARHUS C,DENMARK

来源：

THIN SOLID FILMS | 1983年 / 107卷 / 02期

关键词：

D O I：

10.1016/0040-6090(83)90021-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：191 / 199

页数：9

共 10 条

[1]

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[2]

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[3] EFFECT OF ION BOMBARDMENT ON ADHESION OF ALUMINIUM FILMS ON GLASS [J].

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PERKINS, JG ;

STROUD, PT .

THIN SOLID FILMS, 1969, 4 (01) :41-&

[4] ION-BEAM-INDUCED REACTIONS IN METAL-SEMICONDUCTOR AND METAL-METAL THIN-FILM STRUCTURES [J].

MAYER, JW ;

TSAUR, BY ;

LAU, SS ;

HUNG, LS .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :1-13

[5]

MUENZ WD, 1982, VIDE COUCHES MINCES, V210, P55

[6] THE EFFECT OF ION-IMPLANTATION ON RF-SPUTTERED TIB2 FILMS [J].

PADMANABHAN, KR ;

SORENSEN, G .

THIN SOLID FILMS, 1981, 81 (01) :13-19

[7]

PADMANABHAN KR, 1982, ION IMPLANTATION MET, P352

[8]

PADMANABHAN KR, UNPUB THIN SOLID FIL

[9]

PADMANABHAN KR, 1982, ION IMPLANTATION MET, P361

[10]

Schiott H. E., 1970, Radiation Effects, V6, P107, DOI 10.1080/00337577008235052

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