SCANNING PHOTOEMISSION MICROSCOPY ON MAXIMUM REACHES 0.1 MICRON RESOLUTION

被引：17

作者：

CAPASSO, C

NG, W

RAYCHAUDHURI, AK

LIANG, SH

COLE, RK

GUO, ZY

WALLACE, J

CERRINA, F

UNDERWOOD, J

PERERA, R

KORTRIGHT, J

DE STASIO, G

MARGARITONDO, G

机构：

[1] LAWRENCE BERKELEY LAB, BERKELEY, CA 94720 USA

[2] CNR, IST STRUTTURA MAT, FRASCATI, ITALY

[3] ECOLE POLYTECH FED LAUSANNE, INST PHYS APPL, CH-1015 LAUSANNE, SWITZERLAND

来源：

SURFACE SCIENCE | 1993年 / 287卷

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/0039-6028(93)91124-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We present the first results from the upgraded version of the scanning photoemission spectromicroscope MAXIMUM, bared on synchrotron undulator fight and on a multilayer-coated Schwarzschild objective. The upgrade involved nearly all parts of the instrument, notably the beamline and the electron analysis system. Micro-images of Fresnel zone plates and of metal test patterns on semiconductor substrates reached a new record in lateral resolution, well beyond 0.1 micron. The first spectromicroscopy tests were also successfully performed on the new instrument, with analysis of f and d core levels in different systems.

引用

页码：1046 / 1050

页数：5

共 28 条

[1] INTRACELLULAR STRUCTURE AND ELEMENTAL ANALYSIS IN RAPID-FROZEN NEURONS
ANDREWS, SB
REESE, TS
[J]. ANNALS OF THE NEW YORK ACADEMY OF SCIENCES, 1986, 483 : 284 - 294
[2] HIGH-RESOLUTION X-RAY MICROSCOPY USING AN UNDULATOR SOURCE, PHOTOELECTRON STUDIES WITH MAXIMUM
CAPASSO, C
RAYCHAUDHURI, AK
NG, W
LIANG, S
COLE, RK
WALLACE, J
CERRINA, F
MARGARITONDO, G
UNDERWOOD, JH
KORTRIGHT, JB
PERERA, RCC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03): : 1248 - 1253
[3] MAXIMUM - STATUS OF THE SCANNING PHOTOELECTRON MICROSCOPE
CERRINA, F
LAI, B
GONG, C
RAYCHAUDHURI, A
MARGARITONDO, G
GREEN, MA
HOCHST, H
COLE, R
CROSSLEY, D
COLLIER, S
UNDERWOOD, J
BRILLSON, LJ
FRANCIOSI, A
DELUCA, PM
GOULD, MN
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07) : 2249 - 2249
[4] CERRINA F, 1990, J VAC SCI TECHNOL A, V8, P2563
[5] ELECTRON ENERGY-LOSS SPECTROSCOPY ANALYSIS AND IMAGING OF BIOLOGICAL SPECIMENS
COLLIEX, C
[J]. ANNALS OF THE NEW YORK ACADEMY OF SCIENCES, 1986, 483 : 311 - 325
[6] SCANNING PHOTOELECTRON MICROSCOPY WITH UNDULATOR RADIATION - A SUCCESSFUL TEST ON UNCOATED NEURONS
DE STASIO, G
NG, W
RAYCHAUDHURI, AK
COLE, RK
GUO, ZY
WALLACE, J
MARGARITONDO, G
CERRINA, F
UNDERWOOD, J
PERERA, R
KORTRIGHT, J
MERCANTI, D
CIOTTI, MT
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 294 (1-2) : 351 - 354
[7] HIGH-RESOLUTION PHOTOELECTRON MICROIMAGING OF NEURON NETWORKS
DE STASIO, G
CAPASSO, C
NG, W
RAYCHAUDHURI, AK
LIANG, SH
COLE, RK
GUO, ZY
WALLACE, J
CERRINA, F
MARGARITONDO, G
UNDERWOOD, J
PERERA, R
KORTRIGHT, J
MERCANTI, D
CIOTTI, MT
STECCHI, A
[J]. EUROPHYSICS LETTERS, 1991, 16 (04): : 411 - 414
[8] DESTASIO G, UNPUB
[9] A PERMANENT-MAGNET UNDULATOR FOR SPEAR
HALBACH, K
CHIN, J
HOYER, E
WINICK, H
CRONIN, R
YANG, J
ZAMBRE, Y
[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1981, 28 (03) : 3136 - 3138
[10] X-RAY ABSORPTION NEAR EDGE STRUCTURES OF INTERMEDIATE OXIDATION-STATES OF SILICON IN SILICON-OXIDES DURING THERMAL-DESORPTION
HARP, GR
HAN, ZL
TONNER, BP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03): : 2566 - 2569

← 1 2 3 →