EXPERIMENTS ON THE SPUTTERING OF GROUP-VI ELEMENTS

被引:25
作者
FINK, D
BIERSACK, JP
STADELE, M
TJAN, K
HARING, RA
DEVRIES, AE
机构
[1] FREE UNIV BERLIN, INST KERNPHYS, D-1000 BERLIN 39, FED REP GER
[2] FOM, INST ATOOM MOLECUULFYS, 1098 SJ AMSTERDAM, NETHERLANDS
关键词
D O I
10.1016/0168-583X(84)90080-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:275 / 281
页数:7
相关论文
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