共 12 条
[3]
ELECTRICAL-PROPERTIES OF PLATINUM IN SILICON
[J].
JOURNAL OF APPLIED PHYSICS,
1979, 50 (05)
:3396-3403
[6]
Ghandhi S.K, 1995, VLSI FABRICATION PRI
[7]
Ghandhi SK, 1977, SEMICONDUCTOR POWER
[8]
GLINCHUK KD, 1967, SOVIET PHYS SOLID ST, V8, P2041