STRUCTURAL CHARACTERIZATION AND PROPERTIES ENHANCEMENT OF DIAMOND-LIKE CARBON-FILMS SYNTHESIZED UNDER LOW-ENERGY NE+ BOMBARDMENT

被引：6

作者：

HE, XM

LI, WZ

LI, HD

机构：

[1] Department of Materials Science and Engineering, Tsinghua University, Beijing

来源：

DIAMOND AND RELATED MATERIALS | 1994年 / 3卷 / 11-12期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1016/0925-9635(94)90145-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like carbon (DLC) films were synthesized by Ar+ sputtering graphite with concurrent Ne+ bombardment. Transmission electron microscopy diffraction revealed that some diamond crystals were distributed in the amorphous matrix of DLC films synthesized under Ne+ bombardment at an energy of 200 eV and ion current density of 0.19 mA cm-2. X-ray photo electron spectra showed that the valence band of the DLC films was similar to that of diamond, and the binding energy of C 1s1/2 electrons was 284.9 eV. The DLC films possessed a high hardness of 42.14 GPa and excellent wear resistance. It was confirmed that the wide atomic intermixed film-substrate interface meant that the DLC films would improve greatly the wear-resistant properties of AISI 52100 steel if the DLC films were coated on its surface.

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页码：1319 / 1324

页数：6

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