AN INTERNALLY TUNED TM010 MICROWAVE RESONANT CAVITY FOR MODERATE POWER MICROWAVE-INDUCED PLASMAS

被引：62

作者：

HAAS, DL

CARNAHAN, JW

CARUSO, JA

机构：

来源：

APPLIED SPECTROSCOPY | 1983年 / 37卷 / 01期

关键词：

D O I：

10.1366/0003702834634253

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：82 / 85

页数：4

相关论文

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