FORMATION OF ALN BY NITROGEN ION-IMPLANTATION

被引：35

作者：

RAUSCHENBACH, B

KOLITSCH, A

RICHTER, E

机构：

来源：

THIN SOLID FILMS | 1983年 / 109卷 / 01期

关键词：

D O I：

10.1016/0040-6090(83)90029-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：37 / 45

页数：9

共 21 条

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