ULTRASENSITIVE DETECTION OF RESIDUAL GASES BY MULTIPHOTON IONIZATION MASS-SPECTROMETRY

被引：4

作者：

CHIEN, RL

SOGARD, MR

机构：

[1] Varian Research Center, Palo Alto, California

[2] Lepton Inc, Murray Hill, NJ

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 03期

关键词：

D O I：

10.1116/1.576631

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Sensitive detection of residual gases in ultrahigh vacuum is described, using nonresonant rnultiphoton ionization and time-of-fiight mass spectrometry. Three-photon ionization of Xe and Kr was successfully achieved using a focused KrF excimer laser beam. All stable isotopes of Xe were detected and the relative yields were in excellent agreement with their natural abundances. Detection sensitivity down to a partial pressure of 10−11Torr has been demonstrated. A near-resonant mechanism may be enhancing the Xe yield. © 1990, American Vacuum Society. All rights reserved.

引用

页码：2814 / 2816

页数：3

共 7 条

[1]

BALYKIN VI, 1977, JETP LETT+, V26, P357

[2] NON-LINEAR OPTICAL PROCESSES IN ATOMS AND MOLECULES USING RARE-GAS HALIDE LASERS [J].