TRANSITION-METAL SILICIDES

被引:59
作者
MURARKA, SP
机构
来源
ANNUAL REVIEW OF MATERIALS SCIENCE | 1983年 / 13卷
关键词
D O I
10.1146/annurev.ms.13.080183.001001
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:117 / 137
页数:21
相关论文
共 117 条
[1]   CHEMICAL BONDING AND STRUCTURE OF METAL-SEMICONDUCTOR INTERFACES [J].
ANDREWS, JM ;
PHILLIPS, JC .
PHYSICAL REVIEW LETTERS, 1975, 35 (01) :56-59
[2]  
Aronsson B., 1965, BORIDES SILICIDES PH
[3]   FORMATION OF SILICIDES IN MO-W BILAYER FILMS ON SI SUBSTRATES - MARKER EXPERIMENT [J].
BAGLIN, J ;
DEMPSEY, J ;
HAMMER, W ;
DHEURLE, F ;
PETERSSON, S ;
SERRANO, C .
JOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (05) :641-661
[4]  
BOWER RW, 1973, SOLID STATE ELECTRON, V16, P1461, DOI 10.1016/0038-1101(73)90063-4
[5]   GROWTH KINETICS OBSERVED IN FORMATION OF METAL SILICIDES ON SILICON [J].
BOWER, RW ;
MAYER, JW .
APPLIED PHYSICS LETTERS, 1972, 20 (09) :359-&
[6]  
BRAICOVICH L, 1980, J VAC SCI TECHNOL, V17, P1005, DOI 10.1116/1.570581
[7]   TRANSITION IN SCHOTTKY-BARRIER FORMATION WITH CHEMICAL REACTIVITY [J].
BRILLSON, LJ .
PHYSICAL REVIEW LETTERS, 1978, 40 (04) :260-263
[8]  
Buyco E. H, 1970, THERMOPHYSICAL PROPE, V5
[9]   PT2SI AND PTSI FORMATION WITH HIGH-PURITY PT THIN-FILMS [J].
CANALI, C ;
CATELLANI, C ;
PRUDENZIATI, M ;
WADLIN, WH ;
EVANS, CA .
APPLIED PHYSICS LETTERS, 1977, 31 (01) :43-45
[10]   PHASE-DIAGRAMS AND METAL-RICH SILICIDE FORMATION [J].
CANALI, C ;
MAJNI, G ;
OTTAVIANI, G ;
CELOTTI, G .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (01) :255-258