QUANTITATIVE SIMS MEASUREMENTS OF AL(X)GA(1-X)AS AS A FUNCTION OF ALLOY COMPOSITION AND ION-BEAM ENERGY

被引：9

作者：

CLARK, EA

机构：

[1] Loughborough Univ of Technology, Loughborough, Engl, Loughborough Univ of Technology, Loughborough, Engl

来源：

VACUUM | 1986年 / 36卷 / 11-12期

关键词：

ARGON - ION BEAMS - Applications - MASS SPECTROMETERS;

D O I：

10.1016/0042-207X(86)90127-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

SIMS has been used to measure ion yield ratios from the matrix elements in a range of Al(x)Ga(1 minus x)As alloys at different primary ion energies. A linear relationship has been observed under both O//2** plus and Ar** plus bombardment between the measured Al:Ga ratio and the matrix composition. Under O//2** plus bombardment the ionization probability of As is enhanced by the presence of Al in the sample. The reverse is observed under Ar** plus bombardment

引用

页码：861 / 863

页数：3