PLASMA DIAGNOSTIC STUDIES OF THE INFLUENCE OF PROCESS VARIABLES UPON THE ATOMIC AND MOLECULAR-SPECIES EJECTED FROM (1-X)LI4SIO4-XLI3PO4 TARGETS DURING RADIO-FREQUENCY MAGNETRON SPUTTERING

被引:8
作者
WACHS, AL
BATES, JB
DUDNEY, NJ
LUCK, CF
机构
[1] Solid State Division, Oak Ridge National Laboratory, Oak Ridge
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1991年 / 9卷 / 03期
关键词
D O I
10.1116/1.577394
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The deposition of thin-film electrolytes is a critical step in the development of lithium microbatteries with the potential for circuit integration. We have performed a preliminary study of the radio frequency-magnetron sputtering of (1 - x)Li4SiO4:xLi3PO4 targets used to deposit amorphous thin-film electrolytes formed of the three-component system Li2O-SiO2-P2O5. Mass and optical emission spectroscopies have been used to investigate the effects of target composition and the deposition conditions upon the atomic and molecular species ejected from the targets. The data provide important information for understanding the mechanism of film formation and for monitoring the Li atomic flux onto the substrates during film growth.
引用
收藏
页码:492 / 495
页数:4
相关论文
共 4 条