ELECTRICAL AND OPTICAL-PROPERTIES OF SPUTTERED TINX FILMS AS A FUNCTION OF SUBSTRATE DEPOSITION TEMPERATURE

被引：15

作者：

THORPE, TP

QADRI, SB

WOLF, SA

CLAASSEN, JH

机构：

来源：

APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 19期

关键词：

D O I：

10.1063/1.97425

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1239 / 1241

页数：3

共 11 条

[1]

BEATTIE HJ, 1953, T AM SOC METAL, V45, P397

[2] TIN COATINGS ON STEEL [J].

BUHL, R ;

PULKER, HK ;

MOLL, E .

THIN SOLID FILMS, 1981, 80 (1-3) :265-270

[3]

GOSSETT R, 1986, NUCL INSTRUM METHO B, V15, P481

[4] THE SUPERCONDUCTIVITY OF SOME TRANSITION METAL COMPOUNDS [J].

HARDY, GF ;

HULM, JK .

PHYSICAL REVIEW, 1954, 93 (05) :1004-1016

[5]

KARLSSON B, 1982, P SOC PHOTO-OPT INST, V324, P52, DOI 10.1117/12.933254

[6] INFLUENCE OF THE NITROGEN PARTIAL-PRESSURE ON THE PROPERTIES OF DC-SPUTTERED TITANIUM AND TITANIUM NITRIDE FILMS [J].

LEMPERIERE, G ;

POITEVIN, JM .

THIN SOLID FILMS, 1984, 111 (04) :339-349

[7]

SIEGEL R, 1972, THERMAL RAD HEAT TRA, P111

[8]

Toth L. E., 1971, TRANSITION METAL CAR, P188

[9] SUPERCONDUCTING CRITICAL TEMPERATURES OF NONSTOICHIOMETRIC TRANSITION METAL CARBIDES AND NITRIDES [J].

TOTH, LE ;

WANG, CP ;

YEN, CM .

ACTA METALLURGICA, 1966, 14 (11) :1403-&

[10]

WITTMER M, 1982, THIN SOLID FILMS, V93, P397, DOI 10.1016/0040-6090(82)90145-6

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