ION-IMPLANTATION, ION-BEAM MIXING, AND ANNEALING STUDIES OF METALS IN AL2O3, SIC AND SI3N4

被引：25

作者：

APPLETON, BR

NARAMOTO, H

WHITE, CW

HOLLAND, OW

MCHARGUE, CJ

FARLOW, G

NARAYAN, J

WILLIAMS, JM

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(84)90064-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：167 / 175

页数：9

共 27 条

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