DETECTION OF CH3 DURING CVD GROWTH OF DIAMOND BY OPTICAL-ABSORPTION

被引：53

作者：

CHILDS, MA

MENNINGEN, KL

CHEVAKO, P

SPELLMEYER, NW

ANDERSON, LW

LAWLER, JE

机构：

[1] Department of Physics, University of Wisconsin-Madison, Madison, WI 53706

来源：

PHYSICS LETTERS A | 1992年 / 171卷 / 1-2期

关键词：

D O I：

10.1016/0375-9601(92)90138-C

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The absolute concentration of CH3 is measured during diamond growth for a range of input CH4 concentrations using multi-element optical absorption spectroscopy at wavelengths near 216 nm. A detection limit of 2 X 10(11) CH3 radicals/cm3 has been achieved. We also detect C2H2 during diamond growth using the same technique.

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页码：87 / 89

页数：3

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