CONSTRUCTION OF A NEW MULTIPLE THIN-FILM DEPOSITION SYSTEM

被引:3
作者
GEORGA, SN
PISANIAS, MN
机构
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1983年 / 16卷 / 04期
关键词
D O I
10.1088/0022-3735/16/4/001
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:247 / 248
页数:2
相关论文
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[3]  
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