INVESTIGATION OF PLASMA-GROWN PLANAR ALUMINA FILMS FOR USE IN THE MODELING OF BULK ALUMINA

被引：12

作者：

HALVERSON, DE

COCKE, DL

机构：

[1] Texas A&M Univ, College Station,, TX, USA, Texas A&M Univ, College Station, TX, USA

来源：

THIN SOLID FILMS | 1987年 / 155卷 / 01期

关键词：

This work is supported by a grant from Standard Oil Company. We would like to thank Paul Giordano and George Prohaska of Standard Oil for their helpful discussions;

D O I：

10.1016/0040-6090(87)90459-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：133 / 142

页数：10

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