LARGE-NUMERICAL-APERTURE MICROLENS FABRICATION BY ONE-STEP ETCHING AND MASS-TRANSPORT SMOOTHING

被引：36

作者：

LIAU, ZL ^{[1
]}

MULL, DE ^{[1
]}

DENNIS, CL ^{[1
]}

WILLIAMSON, RC ^{[1
]}

WAARTS, RG ^{[1
]}

机构：

[1] SDL INC,SAN JOSE,CA 95134

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 12期

关键词：

D O I：

10.1063/1.111892

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Precision f/1 microlenses have been fabricated in GaP by smoothing a multiple-mesa structure etched with a designed width and length variation. High-resolution lithography and ion-beam-assisted etching were used for mesa definition and resulted in accurate lens profiles after mass-transport smoothing at 900-1070-degrees-C. This much simplified fabrication technique is highly promising for efficient, diffraction-limited micro-optical elements.

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收藏

页码：1484 / 1486

页数：3

相关论文

共 20 条

[1]

BORN M, 1980, PRINCIPLES OPTICS, P463

[2] PHOTOLYTIC TECHNIQUE FOR PRODUCING MICROLENSES IN PHOTOSENSITIVE GLASS [J].

BORRELLI, NF ;

MORSE, DL ;

BELLMAN, RH ;

MORGAN, WL .

APPLIED OPTICS, 1985, 24 (16) :2520-2525

[3] EXTERNAL-CAVITY COHERENT OPERATION OF INGAASP BURIED-HETEROSTRUCTURE LASER ARRAY [J].

DIADIUK, V ;

LIAU, ZL ;

WALPOLE, JN ;

CAUNT, JW ;

WILLIAMSON, RC .

APPLIED PHYSICS LETTERS, 1989, 55 (21) :2161-2163

[4] MONOLITHIC 2-DIMENSIONAL GAAS ALGAAS LASER ARRAYS FABRICATED BY CHLORINE ION-BEAM-ASSISTED MICROMACHINING [J].

GOODHUE, WD ;

RAUSCHENBACH, K ;

WANG, CA ;

DONNELLY, JP ;

BAILEY, RJ ;

JOHNSON, GD .

JOURNAL OF ELECTRONIC MATERIALS, 1990, 19 (05) :463-469

[5] ZNS MICRO-FRESNEL LENS AND ITS USES [J].

HOSOKAWA, H ;

YAMASHITA, T .

APPLIED OPTICS, 1990, 29 (34) :5106-5110

[6] MASS-SPECTROMETRIC STUDIES OF PHOSPHINE PYROLYSIS AND OMVPE GROWTH OF INP [J].

LARSEN, CA ;

BUCHAN, NI ;

STRINGFELLOW, GB .

JOURNAL OF CRYSTAL GROWTH, 1987, 85 (1-2) :148-153

[7] COHERENT ADDITION OF ALGAAS LASERS USING MICROLENSES AND DIFFRACTIVE COUPLING [J].

LEGER, JR ;

SCOTT, ML ;

VELDKAMP, WB .

APPLIED PHYSICS LETTERS, 1988, 52 (21) :1771-1773

[8] GAINASP-INP BURIED-HETEROSTRUCTURE SURFACE-EMITTING DIODE-LASER WITH MONOLITHIC INTEGRATED BIFOCAL MICROLENS [J].

LIAU, ZL ;

WALPOLE, JN ;

MISSAGGIA, LJ ;

MULL, DE .

APPLIED PHYSICS LETTERS, 1990, 56 (13) :1219-1221

[9] GALLIUM-PHOSPHIDE MICROLENSES BY MASS-TRANSPORT [J].

LIAU, ZL ;

DIADIUK, V ;

WALPOLE, JN ;

MULL, DE .

APPLIED PHYSICS LETTERS, 1989, 55 (02) :97-99

[10] LARGE-NUMERICAL-APERTURE INP LENSLETS BY MASS-TRANSPORT [J].

LIAU, ZL ;

DIADIUK, V ;

WALPOLE, JN ;

MULL, DE .

APPLIED PHYSICS LETTERS, 1988, 52 (22) :1859-1861