FABRICATION OF LA2TI2O7 THIN-FILMS BY A SOL-GEL TECHNIQUE

Sol-gel thin films of La2Ti2o7 were deposited on fused silica and Si(100) substrates by a spin-coating process. The La2Ti207 precursor solution for the spin-coating was prepared from lanthanum acetylacetonate and titanium iso-propoxide dissolved in 2-methoxyethanol. Crystalline and crack-free films of ≈ 0.3 pm thickness were deposited on the above sulastrates using a single coating and followed by annealing at a temperature of 800 °C. Microstructural studies revealed that these films contained extremely fine grains of ≈ 0.1 pm. Thin film X-ray diffraction patterns indicated the formation of grain oriented films along [100] direction on these substrates. © 1992, Taylor & Francis Group, LLC. All rights reserved.