ON MECHANISM OF SPUTTERING

被引：144

作者：

LEHMANN, C

SIGMUND, P

机构：

来源：

PHYSICA STATUS SOLIDI | 1966年 / 16卷 / 02期

关键词：

D O I：

10.1002/pssb.19660160216

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：507 / &

共 30 条

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