KINETIC ROUGHNESS OF AMORPHOUS MULTILAYERS STUDIED BY DIFFUSE-X-RAY SCATTERING

被引:141
作者
SALDITT, T
METZGER, TH
PEISL, J
机构
[1] Sektion Physik, Ludwig-Maximilians-Universität München, 80539 München
关键词
D O I
10.1103/PhysRevLett.73.2228
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We apply the scattering geometry of grazing incidence and exit angles to study the diffuse scattering of an amorphous, magnetron sputtered W/Si multilayer. Only this technique allows for the full range of parallel momentum transfer necessary to determine the height-height self- and cross-correlation functions from the structure factor of the rough interfaces and the exit-angle-resolved intensity, respectively. The self-correlation functions show the logarithmic scaling behavior predicted by the Edwards-Wilkinson Langevin equation, which describes the kinetic roughening of a growing surface. The cross-correlation functions also agree with those derived from the equation.
引用
收藏
页码:2228 / 2231
页数:4
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