THIN-FILM FABRICATION FOR THE JOSEPHSON-TECHNOLOGY CROSS-SECTIONAL MODEL

被引：12

作者：

BRIGHT, AA

GREINER, JH

KLEPNER, SP

WANG, RH

WARNECKE, AJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 01期

关键词：

D O I：

10.1116/1.582509

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：77 / 90

页数：14

共 26 条

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[4]

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[5]

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[6]

BRIGHT AA, UNPUB

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[8]

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[9]

GALLAGHER WR, UNPUB

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IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (02) :130-142

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