[332] GA HABIT PLANES FORMED ON GAAS DURING BR2 - CH3OH ETCHING

被引:10
作者
KOSZI, LA [1 ]
RODE, DL [1 ]
机构
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
关键词
D O I
10.1149/1.2134108
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1676 / 1680
页数:5
相关论文
共 3 条
[1]  
GATOS HC, 1960, SURFACE CHEM METALS, P381
[3]   PREFERENTIAL ETCHING AND ETCHED PROFILE OF GAAS [J].
TARUI, Y ;
KOMIYA, Y ;
HARADA, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (01) :118-&