EXAMINATION OF THE DAMAGE TO A GRAPHITE PROBE CAP EXPOSED TO RF HEATING IN PLT PLASMAS

被引：8

作者：

MANOS, D

BENNETT, T

BUDNY, R

COHEN, S

KILPATRICK, S

TIMBERLAKE, J

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 03期

关键词：

D O I：

10.1116/1.572407

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1348 / 1351

页数：4

共 15 条

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