EFFECT OF VARIOUS FLUORIDE ATOM SPECIES OF ACTIVATED CARBON IN CF4 PLASMA ON RECOVERY OF TRICHLOROETHYLENE

The surface modification of activated carbon using low temperature plasma of tetrafluoromethane was investigated to evaluate the removal of trichloroethylene. The plasma-treated, activated carbon underwent an immersion water and/or heat-treatment. The adsorption isotherms of trichloroethylene onto the activated carbons were measured to elucidate the relationship between the adsorption behavior of trichloroethylene and the introduced fluoride atoms. The trichloroethylene adsorption sites on plasma-treated, activated carbon are related to the fluoride atom species of the adsorption type, that is, the ion type.