INVESTIGATION OF HYDROCARBON-PLASMA-GENERATED CARBON-FILMS BY ELECTRON-ENERGY-LOSS SPECTROSCOPY

被引：266

作者：

FINK, J ^{[1
]}

MULLERHEINZERLING, T ^{[1
]}

PFLUGER, J ^{[1
]}

SCHEERER, B ^{[1
]}

DISCHLER, B ^{[1
]}

KOIDL, P ^{[1
]}

BUBENZER, A ^{[1
]}

SAH, RE ^{[1
]}

机构：

[1] FRAUNHOFER INST ANGEW FESTKORPERPHYS,D-7800 FREIBURG,FED REP GER

来源：

PHYSICAL REVIEW B | 1984年 / 30卷 / 08期

关键词：

D O I：

10.1103/PhysRevB.30.4713

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：4713 / 4718

页数：6

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