DOSE AND ENERGY-DEPENDENCE OF IMPLANTED ION PROFILES (9 LESS-THAN-OR-EQUAL-TO Z1 LESS-THAN-OR-EQUAL-TO 83) IN THE AZ111 PHOTORESIST

被引：34

作者：

GUIMARAES, RB

BEHAR, M

LIVI, RP

DESOUZA, JP

AMARAL, L

ZAWISLAK, FC

FINK, D

BIERSACK, JP

机构：

[1] HAHN MEITNER INST KERNFORSCH BERLIN GMBH, D-1000 BERLIN 39, FED REP GER

[2] HAHN MEITNER INST KERNFORSCH BERLIN GMBH, D-1000 BERLIN 39, FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷

关键词：

D O I：

10.1016/S0168-583X(87)80176-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：882 / 886

页数：5

共 8 条

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[2]

Bello I., 1985, Radiation Effects, V89, P189, DOI 10.1080/00337578508222503

[3]

Biersack J.P., 1982, ION IMPLANTATION TEC, P122, DOI DOI 10.1007/978-3-642-68779-2_5

[4] DISTRIBUTIONS OF LIGHT-IONS AND FOIL DESTRUCTION AFTER IRRADIATION OF ORGANIC POLYMERS [J].

FINK, D ;

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STADELE, M ;

TJAN, K ;

BEHAR, M ;

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ZAWISLAK, FC .

JOURNAL OF APPLIED PHYSICS, 1985, 58 (02) :668-676

[5]

GIBBONS JF, 1985, PROJECTED RANGE STAT

[6] HIGH-ENERGY ION-BEAM MODIFICATION OF POLYMER-FILMS [J].

VENKATESAN, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :461-467

[7]

WASSERMAN B, 1983, COMMUNICATION

[8]

Ziegler J. F., 1985, STOPPING RANGE IONS, V1, DOI [10.1007/978-1-4615-8103-1_3, DOI 10.1007/978-1-4615-8103-1_3]

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