MEASUREMENTS WITH DOUBLE PROBES IN ORGANIC VAPOR FOR UNDERSTANDING GLOW-DISCHARGE POLYMERIZATION PROCESSES

被引：14

作者：

YAMAGUCHI, S

SAWA, G

IEDA, M

机构：

[1] SUZUKA TECH COLL,DEPT ELECT ENGN,SUZUKA,MIE,JAPAN

[2] MIE UNIV,DEPT ELECTR ENGN,TSU,JAPAN

[3] NAGOYA UNIV,DEPT ELECT ENGN,NAGOYA 464,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 06期

关键词：

D O I：

10.1063/1.323998

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2363 / 2369

页数：7

共 27 条

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[4]

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[8] THE FORMATION OF THIN POLYMER FILMS IN THE GAS DISCHARGE [J].

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[10]

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