REACTIVE SPUTTERED CUINSE2

被引:54
作者
THORNTON, JA [1 ]
LOMMASSON, TC [1 ]
TALIEH, H [1 ]
TSENG, BH [1 ]
机构
[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
来源
SOLAR CELLS | 1988年 / 24卷 / 1-2期
关键词
D O I
10.1016/0379-6787(88)90030-0
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
引用
收藏
页码:1 / 9
页数:9
相关论文
共 17 条
  • [1] BURNETT AF, 1986, THESIS U ILLINOIS
  • [2] DAMASKINOS S, 1987, 19TH P PHOT SPEC C N, P1299
  • [3] Lommasson T.C., 1987, 19TH P IEEE PHOT SPE, P1285
  • [4] LOMMASSON TC, 1987, TERNARY MULTINARY CO, P1285
  • [5] Mickelsen R. A., 1982, 16TH P IEEE PHOT SPE, P781
  • [6] Palatnik L. S., 1967, SOV PHYS DOKL, P503
  • [7] Rocheleau R.E., 1987, 19TH P IEEE PHOT SPE, P972
  • [8] STOLT L, 1985, 6TH P COMM EUR COMM, P761
  • [9] REACTIVE SPUTTERED COPPER INDIUM DISELENIDE FILMS FOR PHOTOVOLTAIC APPLICATIONS
    THORNTON, JA
    CORNOG, DG
    HALL, RB
    SHEA, SP
    MEAKIN, JD
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 307 - 311
  • [10] FUNDAMENTAL PROCESSES IN SPUTTERING OF RELEVANCE TO THE FABRICATION OF THIN-FILM SOLAR-CELLS
    THORNTON, JA
    [J]. SOLAR CELLS, 1987, 21 : 41 - 54