FREE-ELECTRON PARAMETERS OF SPUTTERED NOBLE-METAL FILMS

被引：4

作者：

DRYZEK, J

CZAPLA, A

机构：

[1] Acad of Mining & Metallurgy, Dep, of Solid State Physics, Cracow, Pol, Acad of Mining & Metallurgy, Dep of Solid State Physics, Cracow, Pol

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1985年 / 4卷 / 02期

关键词：

FILMS; -; Metallic;

D O I：

10.1007/BF00728063

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The electrical and optical properties of noble metal films have been investigated by many authors. The parameters of free electrons have been determined either from electrical characteristics or from optical transmission and reflection spectra. We have shown that the Fuchs-Sondheimer theory may be applied to the simultaneous description of the optical and electrical properties. The purpose of this investigation was to obtain the free-electron parameters of sputtered noble metal films over a range of film thicknesses where the optical and conduction properties rapidly change. We investigated also the influence of sputtering technique, d. c. and r. f. , on the determined electron parameters.

引用

页码：154 / 158

页数：5

共 10 条

[1]

HOFFMANN H, 1981, THIN SOLID FILMS, V85, P147, DOI 10.1016/0040-6090(81)90627-1

[2] OPTICAL-PROPERTIES OF FREE-ELECTRON METAL-FILMS INCLUDING ELECTRON SURFACE SCATTERING - THEORY [J].

HUTCHISON, FE ;

HANSEN, WN .

PHYSICAL REVIEW B, 1979, 20 (10) :4069-4075

[3] OPTICAL CONSTANTS OF NOBLE METALS [J].

JOHNSON, PB ;

CHRISTY, RW .

PHYSICAL REVIEW B, 1972, 6 (12) :4370-4379

[4] CONDUCTION ELECTRON-OPTICAL MASS IN PURE SILVER [J].

MATHEWSO.AG ;

BERNLAND, LG ;

ARONSSON, H .

JOURNAL OF PHYSICS F-METAL PHYSICS, 1972, 2 (03) :L39-&

[5] AN EXPERIMENTAL CONFIRMATION OF THE DRUDE FREE ELECTRON THEORY OF THE OPTICAL PROPERTIES OF METALS FOR SILVER, GOLD, AND COPPER IN THE NEAR INFRARED [J].

SCHULZ, LG .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1954, 44 (07) :540-545

[6] DETERMINATION OF FREE-ELECTRON PARAMETERS OF THIN-FILMS [J].

SZCZYRBOWSKI, J ;

DRYZEK, J ;

CZAPLA, A .

THIN SOLID FILMS, 1984, 112 (02) :175-191

[7]

SZCZYRBOWSKI J, 1984, 48 PHYS TAG MUNST

[8]

SZCZYRBOWSKI J, 1983, SCI B U MINING METAL, V950, P31

[9] Investigation of the optical properties of Au by means of thin semitransparent films [J].

Theye, Marie-Luce .

PHYSICAL REVIEW B-SOLID STATE, 1970, 2 (08) :3060-3078

[10] REDUCED DENSITY OF EFFECTIVE ELECTRONS IN METAL-FILMS [J].

VANCEA, J ;

HOFFMANN, H .

THIN SOLID FILMS, 1982, 92 (03) :219-225

← 1 →