RF SPUTTERING OF LINBO3 THIN-FILMS

被引：44

作者：

HEWIG, GH ^{[1
]}

JAIN, K ^{[1
]}

SEQUEDA, FO ^{[1
]}

TOM, R ^{[1
]}

WANG, PW ^{[1
]}

机构：

[1] IBM CORP,RES LAB,SAN JOSE,CA 95193

来源：

THIN SOLID FILMS | 1982年 / 88卷 / 01期

关键词：

D O I：

10.1016/0040-6090(82)90351-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：67 / 74

页数：8

共 16 条

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[2]

BORN M, 1975, PRINCIPLES OPTICS, P90

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BOND, WL ;

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[4] ELECTROOPTIC MODULATION OF OPTICAL GUIDED WAVE IN LINBO3 THIN-FILM FABRICATED BY EGM METHOD [J].

FUKUNISHI, S ;

UCHIDA, N ;

MIYAZAWA, S ;

NODA, J .

APPLIED PHYSICS LETTERS, 1974, 24 (09) :424-426

[5] PHASE-MATCHED 2ND-HARMONIC GENERATION AT 440-NM IN A LINBO3-GD3GA5O12 WAVE-GUIDE WITH A TUNABLE STIMULATED RAMAN SOURCE [J].

JAIN, K ;

HEWIG, GH .

OPTICS COMMUNICATIONS, 1981, 36 (06) :483-486

[6] OPTICAL WAVEGUIDING LAYERS IN LINBO3 AND LITAO3 [J].

KAMINOW, IP ;

CARRUTHERS, JR .

APPLIED PHYSICS LETTERS, 1973, 22 (07) :326-328

[7]

Kogelnik H., 1979, INTEGRATED OPTICS, V7, P13

[8] GROWTH OF LINBO3 SINGLE-CRYSTAL FILM FOR OPTICAL WAVEGUIDES [J].

MIYAZAWA, S .

APPLIED PHYSICS LETTERS, 1973, 23 (04) :198-200

[9] MODE CONTROL OF TI-DIFFUSED LINBO3 SLAB OPTICAL-WAVEGUIDE [J].

NAITOH, H ;

NUNOSHITA, M ;

NAKAYAMA, T .

APPLIED OPTICS, 1977, 16 (09) :2546-2549

[10] 2ND HARMONIC-GENERATION IN A SPUTTERED LINBO3 FILM ON MGO [J].

NUNOMURA, K ;

ISHITANI, A ;

MATSUBARA, T ;

HAYASHI, I .

JOURNAL OF CRYSTAL GROWTH, 1978, 45 (01) :355-360

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