PREPARATION OF CONDUCTIVE AND TRANSPARENT THIN-FILMS BY ARGON ION-BEAM SPUTTERING OF ZINC-OXIDE IN ATMOSPHERE CONTAINING HYDROGEN

被引：3

作者：

KOHIKI, S ^{[1
]}

NISHITANI, M ^{[1
]}

WADA, T ^{[1
]}

机构：

[1] MATSUSHITA ELECT IND CO LTD,CENT RES LABS,MORIGUCHI,OSAKA 570,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 12A期

关键词：

ZINC OXIDE; HYDROGEN; ARGON ION BEAM SPUTTERING; CONDUCTIVE FILM; TRANSPARENT FILM;

D O I：

10.1143/JJAP.33.6706

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Conductive and transparent thin films of zinc oxide were prepared by argon ion beam sputtering of a zinc oxide target. The films, deposited at room temperature in an atmosphere containing hydrogen, typically showed the conductivity of 3.8 x 10(2)/Omega . cm. An increase of the hydrogen/argon ratio brought about an increase of carrier concentration, which was reflected by an increase of the absorption energy of the optical spectra.

引用

页码：6706 / 6707

页数：2

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