UNIFIED MODEL OF DAMAGE ANNEALING IN CMOS, FROM FREEZE-IN TO TRANSIENT ANNEALING

被引:36
作者
SANDER, HH [1 ]
GREGORY, BL [1 ]
机构
[1] SANDIA LABS,ALBUQUERQUE,NM 87115
关键词
D O I
10.1109/TNS.1975.4328097
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:2157 / 2162
页数:6
相关论文
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