DEPTH PROFILE DETECTION LIMIT OF 3X10(15) ATOM CM-3 FOR AS IN SI USING CS+ BOMBARDMENT NEGATIVE SECONDARY ION MASS-SPECTROMETRY

被引：46

作者：

WILLIAMS, P

EVANS, CA

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

[2] UNIV ILLINOIS,SCH CHEM SCI,URBANA,IL 61801

来源：

关键词：

D O I：

10.1063/1.89259

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：559 / 561

页数：3

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