COUPLING OF INTERDIGITAL TRANSDUCER TO PLATE MODES IN A SLOTTED ACOUSTICALLY-THIN MEMBRANE

被引:6
作者
CHUANG, CT
WHITE, RM
机构
[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720
[2] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720
关键词
D O I
10.1109/EDL.1983.25638
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:35 / 38
页数:4
相关论文
共 16 条
[1]  
Auld B. A., 1973, ACOUSTIC FIELDS WAVE
[2]   ANISOTROPIC ETCHING OF SILICON [J].
BEAN, KE .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) :1185-1193
[3]  
Farnell G.W., 1972, PHYS ACOUSTICS, V9, P35, DOI DOI 10.1016/B978-0-12-395670-5.50007-6
[4]  
GRUDKOWSKI TW, 1980 P ULTR S, P829
[5]   THEORY OF INTERDIGITAL COUPLERS ON NONPIEZOELECTRIC SUBSTRATES [J].
KINO, GS ;
WAGERS, RS .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (04) :1480-1488
[6]  
LAKIN KM, 1980 P ULTR S, P834
[7]  
MARTIN SJ, 1980 P ULTR S, P113
[8]  
MATTHEWS H, 1977, SURFACE WAVE FILTERS, P168
[9]   SURFACE-ACOUSTIC-WAVE PRESSURE AND TEMPERATURE SENSORS [J].
REEDER, TM ;
CULLEN, DE .
PROCEEDINGS OF THE IEEE, 1976, 64 (05) :754-756
[10]  
SHIOSAKI T, 1978 P ULTR S, P100