3-DIMENSIONAL MAGNETIC INDUCTION MODEL OF AN OCTAGONAL EDGE-DEFINED FILM-FED GROWTH SYSTEM

被引：7

作者：

RAJENDRAN, S

HOLMES, K

MENNA, A

机构：

[1] Mobil Solar Energy Corporation, Billerica, MA 01821

来源：

JOURNAL OF CRYSTAL GROWTH | 1994年 / 137卷 / 1-2期

关键词：

Crystal growth;

D O I：

10.1016/0022-0248(94)91250-5

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Silicon wafers for the photovoltaic industry are produced by growing thin octagonal tubes by the edge-defined film-fed growth (EFG) process. The thermal origin of the wafer thickness variations was studied with a three-dimensional (3D) magnetic induction model. The implementation of the computer code and the significance of the computed results for improving the thickness uniformity are discussed.

引用

页码：77 / 81

页数：5

共 5 条

[1]

BRAUER J, 1988, WHAT EVERY ENG SHOUL

[2]

BRAUER JR, 1991, MSC EMAS USERS MANUA

[3] RECENT PROGRESS IN OCTAGON GROWTH USING EDGE-DEFINED FILM-FED GROWTH [J].