HELIUM MICROPROBE ANALYSIS OF SEMICONDUCTOR-MATERIALS

被引：8

作者：

MCCALLUM, JC ^{[1
]}

MCKENZIE, CD ^{[1
]}

机构：

[1] ROYAL MELBOURNE INST TECHNOL,DEPT COMMUNICAT & ELECTR ENGN,MELBOURNE,VIC 3000,AUSTRALIA

来源：

关键词：

D O I：

10.1109/TNS.1983.4332495

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1228 / 1231

页数：4

共 12 条

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[4] COOKSON JA, 1979, J RADIONAL CHEM, V48, P377
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