INJECTION OF IONS INTO THIN INSULATING FILMS FROM A GLOW-DISCHARGE

被引：6

作者：

CARLSON, DE ^{[1
]}

机构：

[1] RCA LABS,PRINCETON,NJ 08540

来源：

JOURNAL OF APPLIED PHYSICS | 1976年 / 47卷 / 06期

关键词：

D O I：

10.1063/1.323003

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2754 / 2756

页数：3

共 11 条

[1]

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[2] INJECTION OF IONS INTO GLASS FROM A GLOW-DISCHARGE [J].

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[3]

CARLSON DJ, TO BE PUBLISHED

[4]

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[7] FOWLER-NORDHEIM TUNNELING INTO THERMALLY GROWN SIO2 [J].

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SNOW, EH .

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[8] ION NEUTRALIZATION PROCESSES AT INSULATOR SURFACES AND CONSEQUENT IMPURITY MIGRATION EFFECTS IN SIO2 FILMS [J].

MCCAUGHAN, DV ;

KUSHNER, RA ;

MURPHY, VT .

PHYSICAL REVIEW LETTERS, 1973, 30 (13) :614-617

[9] POOLE-FRENKEL EFFECT AND SCHOTTKY EFFECT IN METAL-INSULATOR-METAL SYSTEMS [J].

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PHYSICAL REVIEW, 1967, 155 (03) :657-&

[10] CONDUCTION IN THIN DIELECTRIC FILMS [J].

SIMMONS, JG .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1971, 4 (05) :613-+

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