KINETICS OF DECOMPOSITION OF SILANE (DILUTED IN ARGON) IN A LOW-PRESSURE GLOW-DISCHARGE

被引：20

作者：

NOLET, G ^{[1
]}

机构：

[1] UNIV CATHOLIQUE LOUVAIN,INST ELECT,LAB PHYS & ELECTR ETAT SOLIDE,BATIMENT MAXWELL,1348 LOUVAIN LA NEUVE,BELGIUM

来源：

关键词：

D O I：

10.1149/1.2134390

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1030 / 1034

页数：5

共 18 条

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