THEORY OF GETTER PUMP EVALUATION - STICKING COEFFICIENTS OF COMMON GASES ON CONTINUOUSLY DEPOSITED GETTER FILMS

被引：8

作者：

GRIGOROV, GI

TZATZOV, KK

机构：

来源：

关键词：

D O I：

10.1016/0042-207X(83)90003-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：139 / 148

页数：10

共 28 条

[1] BIRYUKOV.NE, 1970, RUSS J PHYS CH USSR, V44, P79
[2] BIRYUKOVA NE, 1972, RUSS J PHYS CHEM+, V46, P624
[3] CLAUSING RE, 1961, 8 T AVS NAT VAC S, P345
[4] GAS-FLOW IN VACUUM-SYSTEMS
DAYTON, BB
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01): : 243 - &
[5] PERFORMANCE OF A NEW ELECTROSTATIC GETTER-ION PUMP
DENISON, DR
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1967, 4 (04): : 156 - &
[6] EHRLICH G, 1956, J PHYS CHEM SOLIDS, V1, P1
[7] GRIGOROV GI, 1980, 8TH P IVC, P327
[8] GRIGOROV GI, 1977, 7TH P IVC, P97
[9] GRIGOROV GI, 1981, INTERNAL REPORT I EL
[10] GRIGOROV GI, INTERNAL REPORT I EL