BORON-NITRIDE THIN-FILMS ON SI(100) BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION

被引：6

作者：

DEVI, GS ^{[1
]}

ROY, S ^{[1
]}

RAO, VJ ^{[1
]}

机构：

[1] INDIAN INST CHEM TECHNOL,DIV INORGAN & PHYS CHEM,THIN FILMS LAB,HYDERABAD 500007,INDIA

来源：

SOLID STATE COMMUNICATIONS | 1993年 / 87卷 / 01期

关键词：

D O I：

10.1016/0038-1098(93)90538-X

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Crystalline boron nitride thin films have been deposited on silicon substrates by MO-CVD at different temperatures using a single source III-V precursor in N2 ambient. The deposited films are characterized by XRD and IR techniques. XRD confirms that the films are mostly polycrystalline with (111), (200), (004), (103) oriented cubic and hexagonal phases of boron nitride. IR also shows a mixture of cubic and nexagonal boron nitride phases.

引用

页码：67 / 70

页数：4

共 12 条

[1] PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION AND CHARACTERIZATION OF BORON-NITRIDE GATE INSULATORS ON INP
BATH, A
VANDERPUT, PJ
BECHT, JGM
SCHOONMAN, J
LEPLEY, B
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 70 (08) : 4366 - 4370
[2] PREPARATION AND CHARACTERIZATION OF THIN PROTECTIVE FILMS IN SILICA TUBES BY THERMAL-DECOMPOSITION OF HEXACHLOROBORAZINE
CONSTANT, G
FEURER, R
[J]. JOURNAL OF THE LESS-COMMON METALS, 1981, 82 (1-2): : 113 - 118
[3] GROSS ME, 1989, MAT RES SOC S PROR, V131
[4] SYNTHESIS OF CUBIC BORON-NITRIDE FROM BORON-NITRIDE SYNTHESIZED BY PRESSURE PYROLYSIS OF BORAZINE
HIRANO, S
FUJII, A
YOGO, T
NAKA, S
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (08) : 2238 - 2241
[5] INAGAWA K, 1987, J VAC SCI TECHNOL A, V59, P2696
[6] REACTION OF MONO- AND DIMETHYLAMINES WITH PHOSPHORUS TRIFLURIDE BORANE
KODAMA, G
PARRY, RW
[J]. INORGANIC CHEMISTRY, 1965, 4 (03) : 410 - &
[7] HIGH-PRESSURE PHASES OF BORON-NITRIDE GROWN BY LASER-ASSISTED PLASMA CHEMICAL VAPOR-DEPOSITION FROM BCL3+NH3+H-2+AR
KOMATSU, S
MORIYOSHI, Y
KASAMATSU, M
YAMADA, K
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 70 (11) : 7078 - 7084
[8] KOMATSU S, 1991, J PHYS D, V24, P1689
[9] ABINITIO STUDY OF THE FORMATION OF H2B=NH2 FROM NH3 AND B2H6
MCKEE, ML
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1992, 96 (13) : 5380 - 5385
[10] NOETH H, 1960, CHEM BER, V93, P928

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