INTERFEROMETRIC MEASUREMENTS OF THE SURFACE PROFILE OF MOVING SAMPLES

被引:15
作者
PETERSON, RW [1 ]
ROBINSON, GM [1 ]
CARLSEN, RA [1 ]
ENGLUND, CD [1 ]
MORAN, PJ [1 ]
WIRTH, WM [1 ]
机构
[1] THREE M CO,DIV DATA RECORDING PROD,ST PAUL,MN 55144
来源
APPLIED OPTICS | 1984年 / 23卷 / 10期
关键词
D O I
10.1364/AO.23.001464
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:1464 / 1466
页数:3
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