SOME PRACTICAL CONSIDERATIONS FOR ION MICROTOMOGRAPHY

被引:24
作者
PONTAU, AE
ANTOLAK, AJ
MORSE, DH
机构
[1] Sandia National Laboratories, Livermore
关键词
D O I
10.1016/0168-583X(90)90886-Y
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Spatial broadening and energy straggling of the analysis beam can dictate the choice of ion species and required fluence for given spatial and density resolution in ion microtomography (IMT). For extended objects, fine spatial resolution also implies huge data sets. Data acquisition, reduction, and reconstruction rates must be maximized to achieve optimal materials analysis times. In this paper, we discuss these topics and current efforts in this field, present examples of IMT, and consider future directions. © 1990.
引用
收藏
页码:503 / 507
页数:5
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