DETECTION OF SEMICONDUCTOR DOPANTS USING ACCELERATOR MASS-SPECTROMETRY

被引：19

作者：

ANTHONY, JM ^{[1
]}

DONAHUE, DJ ^{[1
]}

JULL, AJT ^{[1
]}

ZABEL, TH ^{[1
]}

机构：

[1] UNIV ARIZONA,TUCSON,AZ 85721

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 10-1卷 / MAY期

关键词：

D O I：

10.1016/0168-583X(85)90295-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：498 / 500

页数：3

共 6 条

[1] ACCELERATOR BASED MASS-SPECTROMETRY OF SEMICONDUCTOR-MATERIALS [J].

ANTHONY, JM ;

THOMAS, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :463-467

[2]

EINSPRUCH NG, 1983, VLSI ELECTRONICS

[3] ULTRASENSITIVE MASS-SPECTROMETRY WITH TANDEM ACCELERATORS [J].

LITHERLAND, AE ;

BEUKENS, RP ;

KILIUS, LR ;

RUCKLIDGE, JC ;

GOVE, HE ;

ELMORE, D ;

PURSER, KH .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 186 (1-2) :463-477

[4] RADIOISOTOPE DATING WITH A CYCLOTRON [J].

MULLER, RA .

SCIENCE, 1977, 196 (4289) :489-494

[5] ATTEMPT TO DETECT STABLE N- IONS FROM A SPUTTER ION-SOURCE AND SOME IMPLICATIONS OF RESULTS FOR DESIGN OF TANDEMS FOR ULTRA-SENSITIVE CARBON ANALYSIS [J].

PURSER, KH ;

LIEBERT, RB ;

LITHERLAND, AE ;

BEUKENS, RP ;

GOVE, HE ;

BENNETT, CL ;

CLOVER, MR ;

SONDHEIM, WE .

REVUE DE PHYSIQUE APPLIQUEE, 1977, 12 (10) :1487-1492

[6]

Wittkower A. B., 1973, Atomic Data, V5, P113, DOI 10.1016/S0092-640X(73)80001-4

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