HYDROGEN EVOLUTION AND DIFFERENTIAL THERMAL-ANALYSIS IN AMORPHOUS AND MICROCRYSTALLINE HYDROGENATED SILICON

被引：13

作者：

KUMEDA, M

KOMATSU, H

SHIMIZU, T

机构：

[1] Kanazawa Univ, Dep of Electronics,, Kanazawa, Jpn, Kanazawa Univ, Dep of Electronics, Kanazawa, Jpn

来源：

THIN SOLID FILMS | 1985年 / 129卷 / 3-4期

关键词：

The authors thank Mr. A. Morimoto for help with the preparation of the samples and for discussions and Mr. M. Kinka for technical assistance. This work was partly supported by the Sunshine Project of the Ministry of International Trade and Industry of Japan;

D O I：

10.1016/0040-6090(85)90049-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

8

引用

收藏

页码：227 / 230

页数：4

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