THE BOHM CRITERION IN THE PRESENCE OF RADIOFREQUENCY FIELDS

被引:14
作者
ALLEN, JE
SKORIK, MA
机构
[1] Department of Engineering Science, University of Oxford, Oxford OX1 3PJ, Parks Road
关键词
D O I
10.1017/S0022377800027045
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
In d.c. discharges the Bohm condition is the condition for sheath formation, the ion velocity at the plasma boundary having to satisfy the condition 1/2Mv2 1/2k(B)T(e), if the spread of velocities is ignored. The model is a good one if the Debye distance is small compared with the relevant scale length. As there is much current interest in radio-frequency (RF) discharges, the question arises as to whether the criterion remains valid in the presence of RF fields. The question has been studied recently by Riemann, following earlier work by Allen who compared the plasma boundary to a sonic surface. Riemann considered a wider range of frequencies and obtained a dispersion relation that was a quartic equation. The present paper examines the complex roots of this equation, using a method developed by Briggs. The results substantiate Riemann's statement that the Bohm criterion is still valid in the presence of RF fields.
引用
收藏
页码:243 / 249
页数:7
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